Detectable Gases

Gas Name Chemical Formula Range Sensor Part Number

Ammonia NH3 0 - 100ppm MIDAS-S-NH3

Arsine AsH3 0 - 0.2ppm MIDAS-S-ASH

Boron Trichloride BCl3 0 - 8.0ppm MIDAS-S-HCL

Boron Trifluoride BF3 0 - 8.0ppm MIDAS-S-HFX

Boron Trifluoride (Low Level) BF3 0 - 2.0ppm MIDAS-S-HFL

Bromine Br2 0 - 0.4ppm MIDAS-S-BR2

Carbon Dioxide CO2 0 - 2.0% vol MIDAS-S-CO2

Carbon Monoxide CO 0 - 100ppm MIDAS-S-COX

Chlorine Cl2 0 - 2.0ppm MIDAS-S-HAL

Chlorine Dioxide ClO2 0 - 0.4ppm MIDAS-S-BR2

Chlorine Trifluoride ClF3 0 - 0.4ppm MIDAS-S-SF4

Diborane B2H6 0 - 0.4ppm MIDAS-S-HYD

Dichlorosilane H2SiCl2 0 - 8.0ppm MIDAS-S-HCL

Difluoromethane CH2F2 0 - 120ppm MIDAS-S-CFX

Disilane Si2H6 0 - 20ppm MIDAS-S-SHX

Fluorine F2 0 - 4.0ppm MIDAS-S-HAL

Germane GeH4 0 - 0.8ppm MIDAS-S-HYD

Hexafluorobutadiene C4F6 0 - 40ppm MIDAS-S-CFX

Hydrogen (% LEL)* H2 0 - 100% LEL MIDAS-S-LEL

Hydrogen (ppm) H2 0 - 1000ppm MIDAS-S-H2X

Hydrogen Bromide HBr 0 - 8.0ppm MIDAS-S-HCL

Hydrogen Chloride HCl 0 - 8.0ppm MIDAS-S-HCL

Hydrogen Cyanide HCN 0 - 20ppm MIDAS-S-HCN

Hydrogen Fluoride HF 0 - 12ppm MIDAS-S-HFX

Hydrogen Fluoride (Low Level) HF 0 - 2.0ppm MIDAS-S-HFL

Hydrogen Sulphide H2S 0 - 40ppm MIDAS-S-H2S

Hydrogen Sulphide (High Level) H2S 0 - 100ppm MIDAS-S-HSH

Methane (% LEL)* CH4 0 - 100% LEL MIDAS-S-LEL

Methyl Fluoride CH3F 0 - 60ppm MIDAS-S-CFX

Nitrogen Dioxide NO2 0 -12ppm MIDAS-S-NO2

Nitrogen Oxide NO 0 - 100ppm MIDAS-S-NOX

Nitrogen Trifluoride NF3 0 - 40ppm MIDAS-S-HFX

Octofluorocyclopentene C5F8 0 - 40ppm MIDAS-S-CFX

Oxygen Proficiency & Deficiency O2 0 - 25% vol MIDAS-S-O2X

Ozone O3 0 - 0.4ppm MIDAS-S-O3X

Phosphine PH3 0 - 1.2ppm MIDAS-S-PH3

Phosphorous Oxychloride POCl3 0 - 0.4ppm MIDAS-S-POC

Silane SiH4 0 - 20ppm MIDAS-S-SHX

Silane (low level) SiH4 0 - 2.0ppm MIDAS-S-SHL

Sulphur Dioxide SO2 0 - 8.0ppm MIDAS-S-SO2

Sulphur Hexafluoride SF6 0 - 8000ppm MIDAS-S-CFX

Sulphur Tetrafluoride SF4 0 - 0.4ppm MIDAS-S-SF4

Tetra Ethyl Ortho Silicate TEOS 0 - 40ppm MIDAS-S-TEO

Tungsten Hexafluoride WF6 0 - 12ppm MIDAS-S-HFX

Tungsten Hexafluoride (Low Level) WF6 0 - 2.0ppm MIDAS-S-HFL

 

氨 NH3 0-100 ppm MIDAS-S-NH3 氨 氨

砷化三氫 AsH3 0-0.2 ppm MI DAS-S-ASH 砷化三氫 磷化氫

三氯化硼 BCl3 0-8.0 ppm MIDAS-S-HCL 氯化氫 氯

三氟化硼 BF3 0-8.0 ppm MIDAS-S-HFX 氟化氫 氯

溴 Br2 0-0.4 ppm MIDAS-S-BR2 氯 氯

二氧化碳 CO2 0-2.0% vol MIDAS-S-CO2 二氧化碳 二氧化碳

一氧化碳 CO 0-100 ppm MIDAS-S-COX 一氧化碳 一氧化碳

氯 Cl2 0-2.0 ppm MI DAS-S-HAL 氯 氯

二氧化氯 ClO2 0-0.4 ppm MIDAS-S-BR2 氯 氯

三氟化氯 ClF3 0-0.8 ppm MIDAS-S-SF4 氟化氫 氯

硼乙烷 B2 0-0.4 ppm MIDAS-S-HYD 硼乙烷 磷化氫

二氯甲硅烷 H2SiCl2 0-8.0 ppm MIDAS-S-HCL 氯化氫 氯

乙硅烷 Si2H6 0-20 ppm MIDAS-S-SHX 硅烷 硫化氫

氟 F2 0-4.0 ppm MI DAS-S-HAL 氯 氯

鍺烷 GeH4 0-0.8 ppm MIDAS-S-HYD Diborane Phosphine

氫 (% LEL) H2 0-100% LEL1 MIDAS-S-LEL 氫 氫

氫(ppm) H2 0-1000 ppm MIDAS-S-H2X 氫 氫

溴化氫 HBr 0-8.0 ppm MIDAS-S-HCL 氯化氫 氯

氯化氫 HCl 0-8.0 ppm MIDAS-S-HCL 氯化氫 氯

氰化氫 HCN 0-20 ppm MIDAS-S-HCN 氰化氫 一氧化碳

氟化氫 HF 0-12 ppm MIDAS-S-HFX 氟化氫 氯

硒化氫 H2Se 0-0.4 ppm MIDAS-S-HSE 硅烷 硫化氫

硫化氫 H2S 0-40 ppm MIDAS-S-H2S 硫化氫 硫化氫

甲烷(% LEL) CH4 0-100% LEL1 MIDAS-S-LEL 氫 氫

二氧化氮 NO2 0-12 ppm MIDAS-S-NO2 二氧化氮 二氧化氮

一氧化氮 NO 0-100 ppm MIDAS-S-NOX 一氧化氮 一氧化氮

三氟化氮 NF3 0-40 ppm MIDAS-S-HFX 氟化氫 氯

氧氣重組&不足 O2 0-25% vol MIDAS-S-O2X 氧氣 空氣

臭氧 O3 0-0.4 ppm MIDAS-S-O3X 臭氧 氯氣

磷化氫 PH3 0-1.2 ppm MIDAS-S-PH3 磷化氫 磷化氫

氯氧化磷 POCl3 0-0.8 ppm MIDAS-S-POC 氯化氫 氯

硅烷 SiH4 0-20 ppm MIDAS-S-SHX 硅烷 硫化氫

硅烷(低級別) SiH4 0-2.0 ppm MIDAS-S-SHL 硅烷 硫化氫

二氧化硫 SO2 0-8.0 ppm MIDAS-S-SO2 二氧化硫 二氧化硫

四氟化硫 SF4 0-0.8 ppm MIDAS-S-SF4 氟化氫 氯

正硅酸乙酯 TEOS 0-40 ppm MIDAS-S-TEO TEOS 一氧化碳

六氟化鎢 WF6 0-12 ppm MIDAS-S-HFX 氟化氫 氯