電子特氣系統(tǒng)在半導(dǎo)體制程擴(kuò)散工藝中的應(yīng)用--MIDAS氣體檢測(cè)器
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電子特氣系統(tǒng)在半導(dǎo)體制程擴(kuò)散工藝中的應(yīng)用
?在半導(dǎo)體制造中，擴(kuò)散工藝是一種常用的生產(chǎn)工藝，是一種摻雜技術(shù)，而電子特氣系統(tǒng)是能將擴(kuò)散工藝所需的元素氣體原材料，在保護(hù)氣體純度的同時(shí)，安全穩(wěn)定的供應(yīng)到使用設(shè)備。
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?什么是擴(kuò)散工藝？
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擴(kuò)散工藝是一種摻雜技術(shù)，在高溫條件下，利用熱擴(kuò)散原理將雜質(zhì)元素按工藝要求對(duì)半導(dǎo)體晶圓進(jìn)行摻雜，即將元素磷、硼擴(kuò)散入硅襯底中，從而改變和控制半導(dǎo)體內(nèi)雜質(zhì)的類型、濃度和分布，改變硅材料的電學(xué)特性，以便建立起不同的電特性區(qū)域。
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擴(kuò)散工藝在半導(dǎo)體制造中應(yīng)用主要體現(xiàn)在對(duì)關(guān)鍵結(jié)構(gòu)PN結(jié)形成的作用上。因?yàn)閱为?dú)的擴(kuò)散工藝還有一些缺陷：如高溫?cái)U(kuò)散時(shí)間長、生產(chǎn)周期長、所需溫度高等，這些缺陷會(huì)對(duì)半導(dǎo)體的產(chǎn)量、質(zhì)量和成品率等都會(huì)造成影響，所以，在PN結(jié)的制造中，擴(kuò)散工藝常搭配離子注入技術(shù)一起使用。
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??特氣系統(tǒng)的應(yīng)用：
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在半導(dǎo)體制造中，特氣系統(tǒng)將含元素離子氣體作為摻雜氣體注入到晶圓表面，通過擴(kuò)散原理改變硅材料的電學(xué)特性，形成半導(dǎo)體PN結(jié)。
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半導(dǎo)體行業(yè)對(duì)所用的氣體，不管是純度還是氣體性質(zhì)都有著使用要求，被稱為電子特氣，大多數(shù)是易燃易爆、劇毒、腐蝕性的特殊氣體，具有很大的危險(xiǎn)性。超高純電子特氣系統(tǒng)，就是在保護(hù)電子特氣純度、避免外界雜質(zhì)污染的同時(shí)，保證氣體的使用安全、壓力穩(wěn)定和使用設(shè)備的精準(zhǔn)供氣。
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HONEYWELL MIDAS-E-HFX
HONEYWELL MIDAS-E-HFU
HONEYWELL MIDAS-E-HFU
HONEYWELL MIDAS-E-HFU
?Honeywell MIDAS-E-HAL
HONEYWELL MIDAS-E-B2H
HONEYWELL MIDAS-E-B2H
HONEYWELL MIDAS-E-XCF
?Honeywell MIDAS-T-NP1
?Honeywell MIDAS-E-PH3
?Honeywell MIDAS-L-O2S
?Honeywell MIDAS-L-O2S
HONEYWELL MIDAS-PGD
Honeywell MIDAS-E-COX
HONEYWELL MIDAS-E-XCF
honeywell MIDAS-E-XHF
?Honeywell MIDAS-E-H2X
?Honeywell MIDAS-L-O2S
?Honeywell MIDAS-L-O2S
?Honeywell MIDAS-T-NP1
?Honeywell MIDAS-E-H2X
?Honeywell MIDAS-T-006G
?Honeywell MIDAS-T-006G
?Honeywell MIDAS-T-006G
Honeywell MIDAS-E-COX
?Honeywell MIDAS-T-NP1
Honeywell MIDAS-E-PHX
HONEYWELL MIDAS-E-SHX
?Honeywell MIDAS-E-HCL
HONEYWELL MIDAS-E-NH3
HONEYWELL MIDAS-E-XCF
Honeywell MIDAS-E-COX
?Honeywell MIDAS-T-NP1
HONEYWELL MIDAS-E-SHX
honeywell MIDAS-E-XHF
?Honeywell MIDAS-T-004G
HONEYWELL MIDAS-E-NH3
?Honeywell MIDAS-T-006G
?Honeywell MIDAS-T-NP1
HONEYWELL MIDAS-E-SHX
?Honeywell MIDAS-E-HCL
?Honeywell MIDAS-E-HCL
HONEYWELL MIDAS-E-SHX
?Honeywell MIDAS-E-HCL
?Honeywell MIDAS-E-HCL
HONEYWELL MIDAS-E-NH3
HONEYWELL MIDAS-E-NH3
HONEYWELL MIDAS-E-NH3
HONEYWELL MIDAS-E-NH3
HONEYWELL MIDAS-E-NH3
HONEYWELL MIDAS-E-SHX
HONEYWELL MIDAS-E-SHX
HONEYWELL MIDAS-E-SHX
?Honeywell MIDAS-T-NP1
HONEYWELL MIDAS-E-SHX
HONEYWELL MIDAS-E-SHX
HONEYWELL MIDAS-E-NOX
?Honeywell MIDAS-E-HAL
?Honeywell MIDAS-T-NP1
HONEYWELL MIDAS-E-SHX
?Honeywell MIDAS-E-HCL
?Honeywell MIDAS-T-NP1
Honeywell MIDAS-A-007
HONEYWELL MIDAS-E-SHX
?Honeywell MIDAS-E-HCL
?Honeywell MIDAS-E-HAL
HONEYWELL MIDAS-E-SHX
?Honeywell MIDAS-T-NP1
HONEYWELL MIDAS-E-SHX
?Honeywell MIDAS-E-HCL
HONEYWELL MIDAS-E-SHX
HONEYWELL MIDAS-E-SHX
?Honeywell MIDAS-E-HAL
?Honeywell MIDAS-T-NP1
?Honeywell MIDAS-T-004G
?Honeywell MIDAS-T-004G
?Honeywell MIDAS-T-NP1
?Honeywell MIDAS-E-HCL
?Honeywell MIDAS-E-HCL
?Honeywell MIDAS-E-HCL
?Honeywell MIDAS-E-HCL
?Honeywell MIDAS-T-NP1
?Honeywell MIDAS-E-HCL
?Honeywell MIDAS-E-HCL
Honeywell MIDAS-A-007
Honeywell MIDAS-A-007
Honeywell MIDAS-E-COX
?Honeywell MIDAS-T-004G
?Honeywell MIDAS-T-004G
HONEYWELL MIDAS-A-009
HONEYWELL MIDAS-A-009
HONEYWELL MIDAS-A-009
HONEYWELL MIDAS-E-NO2
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